Shielded arc ion plating and structural characterization of amorphous carbon nitride thin films

Thin Solid Films

Volumn 304, Issue 1-2, 1997, Pages 183-190

  Taki, Yusuke ^a   Kitagawa, Toshihisa ^a   Takai, Osamu ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Carbon; Hardness; Ion plating; Nitride

Indexed keywords

CHEMICAL BONDS; COMPOSITION EFFECTS; ELECTRONIC STRUCTURE; HARDNESS; ION BOMBARDMENT; NITRIDES; PLATING; THIN FILMS;

CARBON NITRIDE; SHIELDED ARC ION PLATING;

AMORPHOUS FILMS;

EID: 0031186143     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00193-4     Document Type: Article

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