Chemical sputtering of carbon films by low energy N2+ ion bombardment

Diamond and Related Materials

Volumn 5, Issue 10, 1996, Pages 1152-1158

  Hammer, P ^a   Gissler, W ^a  

^a JOINT RESEARCH CENTRE   (Italy)

Author keywords

Carbon films; Chemical sputtering; Ion bombardment

Indexed keywords

EID: 0001245503     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(96)00527-4     Document Type: Article

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