Effects of the plasma conditions on the bonding type in carbon nitride thin films

Materials Research Society Symposium - Proceedings

Volumn 441, Issue , 1997, Pages 687-692

  Mendez, J M ^a   Muhl, S ^a   Gaona Couto, A ^a   Jimenez Sandoval, Sergio ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY MIXTURES; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; ION BOMBARDMENT; LATTICE VIBRATIONS; MAGNETRON SPUTTERING; NITRIDES; PLASMA APPLICATIONS; THERMAL EFFECTS;

CARBON NITRIDE; RAMAN MICROPROBE SPECTROSCOPY;

THIN FILMS;

EID: 0030682728     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)