Preparation and characterization of carbon nitride thin films

Thin Solid Films

Volumn 279, Issue 1-2, 1996, Pages 34-42

  Wan, L ^a   Egerton, R F ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Carbon; Electron energy loss spectroscopy; Nitride; Transmission electron microscopy

Indexed keywords

ANNEALING; CHARACTERIZATION; CHEMICAL BONDS; CRYSTAL STRUCTURE; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; EVAPORATION; FILM PREPARATION; IONIZATION; NITRIDES; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

CARBON ARC EVAPORATION; CARBON NITRIDE THIN FILMS; CARBON NITROGEN BONDS; HIGH PRESSURE SYNTHESIS; TRANSMISSION ELECTRON DIFFRACTION;

THIN FILMS;

EID: 0030164560     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08126-7     Document Type: Article

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