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Volumn 109-110, Issue , 1997, Pages 544-548
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CN x thin films obtained by laser induced CVD in different gas-substrate systems
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL STRUCTURE;
LASER APPLICATIONS;
NITRIDES;
ORGANIC COMPOUNDS;
PHASE COMPOSITION;
SUBSTRATES;
X RAY PHOTOELECTRON SPECTROSCOPY;
CARBON NITRIDES;
GAS SUBSTRATE SYSTEMS;
TRANSFER STATES;
THIN FILMS;
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EID: 0031077884
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(96)00632-0 Document Type: Article |
Times cited : (18)
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References (16)
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