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Volumn 82, Issue 10, 1997, Pages 4912-4915
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Effect of ultraviolet light irradiation on amorphous carbon nitride films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS CARBON NITRIDE FILMS;
CLUSTER MODELS;
FILM STRUCTURE;
NITROGEN INCORPORATION;
STRUCTURAL MODIFICATIONS;
ULTRAVIOLET LIGHT IRRADIATION;
ULTRAVIOLET LIGHTS;
UV IRRADIATION;
UV-LIGHT IRRADIATION;
UV-VIS SPECTROSCOPY;
AMORPHOUS FILMS;
CARBON FILMS;
CARBON NITRIDE;
CYCLOTRONS;
IRRADIATION;
NITROGEN;
NITROGEN PLASMA;
ULTRAVIOLET RADIATION;
ULTRAVIOLET SPECTROSCOPY;
AMORPHOUS CARBON;
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EID: 0000777074
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.366356 Document Type: Article |
Times cited : (47)
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References (21)
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