Synthesis of carbon nitride films at low temperatures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 107-112

  Hammer, P ^a,b   Baker, M A ^a   Lenardi, C ^a   Gissler, W ^a  

^a JOINT RESEARCH CENTRE   (Italy)

^b UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031543052     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580481     Document Type: Article

References (14)

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