The composition and bonding structure of CNx films and their influence on the mechanical properties

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 130-134

  Chowdhury, A K M S ^a   Monclus, M ^a   Cameron, D C ^a   Gilvarry, J ^a   Murphy, M J ^b   Barradas, N P ^c   Hashmi, M S J ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b TRINITY COLLEGE DUBLIN   (Ireland)

^c UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

CNx films; Mechanical properties; Reactive DC sputtering

Indexed keywords

ANNEALING; CHEMICAL BONDS; HARDNESS; INTERFACES (MATERIALS); LIGHT ABSORPTION; MAGNETRON SPUTTERING; STRESS CONCENTRATION; STRUCTURE (COMPOSITION);

CARBON NITRIDE FILMS;

AMORPHOUS FILMS;

EID: 0031251027     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00381-7     Document Type: Article

References (16)

1. A.Y. Liu and M.L. Cohen, Science, 245 (1989) 841.
2. A.Y. Liu and M.L. Cohen, Phys. Rev., B 41 (1990) 10727.
3. T.-A. Yeh, C.-L. Lin, J.M. Siertsen and J.H. Judy, J. Magn. & Magn. Mater., 120 (1993) 314.
4. P.V. Kola, B.C. Cameron, B.J. Meenan, K.A. Pischow, C.A. Anderson, N.M.D. Brown and M.S. Hashmi, J. Surf. Coatings Technol., 74-75 (1995) 696.
5. N. Nakayama, Y. Tsuchiya, S. Tamada, K. Kosuge, S. Nagata, K. Takahiro and S. Yamaguchi, Jpn. J. Appl. Phys., 32 (1993) 1465.
6. Z.J. Zhang, S. Fan, J. Huang and C.M. Lieber, J. Electron. Mater., 25 (1996) 57.
7. Z.J. Zhang, S. Fan and C.M. Lieber, Appl. Phys. Lett., 26 (1995) 3582.
8. L. Maya, D.R. Cole and E.W. Hagaman, J. Am. Ceram. Soc., 74 (1991) 1686.
9. L.S. Lopez, Y.W. Chung, M.-S. Wong and W.D. Sproul, J. Vac. Sci. Technol., A13 (1995) 1063.
10. S. Kumar and T.L. Tansley, Solid State Comm., 88 (1993) 803.
11. D. Marton, K.J. Boyd and J.W. Rabalais, Int. J. Mod. Phys., B927 (1995) 3527.
12. M.J. Murphy, D.C. Cameron, J. Monaghan, A.K.M.S. Chowdhury, M. Tyrrell, R. Walsh, M. Monclus, M.S.J. Hashmi, International Conference on Thin Films and Metallurgical Coatings, San Diego, 22-26 April 1996.
13. M.J. Murphy, B.C. Cameron, J. Monaghan, A.K.M.S. Chowdhury, M. Tyrrell, R. Walsh, M. Monclus and M.S.J. Hashmi, submitted to J. Vac. Sci. Technol..
14. W.C. Oliver, G.M. Pharr and B.N. Lucas, Mechanical characterisation using indentation experiments, in M. Nastasi (ed.), Mechanical Properties and Deformation Behaviour of Materials Having Ultra-Fine Structure, Kluwer, Holland, 1993, p 417.
15. S. Veprek, J. Weidmann and F. Glatz, J. Vac. Sci. Technol., A136 (1995) 2914.
16. G. Socrates, Infrared Characteristic Group Frequecies, Wiley, New York, 1980, p. 8.