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Volumn , Issue , 2012, Pages 401-421

Challenges in Atomic Layer Deposition

Author keywords

Atomic layer deposition; Atomic layer epitaxy; Binary compounds; Nucleation; Quadrupole mass spectroscopy; Quartz crystal microbalance

Indexed keywords


EID: 84884114708     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527639915.ch17     Document Type: Chapter
Times cited : (3)

References (159)
  • 1
    • 0000836443 scopus 로고    scopus 로고
    • (ed. H.S. Nalwa), Academic Press, New York
    • Ritala, M. and Leskelä, M. (2002) Handbook of Thin Film Materials, vol. 1 (ed. H.S. Nalwa), Academic Press, New York, pp. 103-159.
    • (2002) Handbook of Thin Film Materials , vol.1 , pp. 103-159
    • Ritala, M.1    Leskelä, M.2
  • 109
    • 84884092340 scopus 로고    scopus 로고
    • Deposition of transition metal carbides US Patent 6,482,262
    • Elers, K.-E. (2002) Deposition of transition metal carbides US Patent 6,482,262.
    • (2002)
    • Elers, K.-E.1
  • 110
    • 84883908864 scopus 로고    scopus 로고
    • Deposition of carbon and transition metal containing thin films US Patent Application 2004/0208994
    • Härkönen, K., Doczy, M., Lang, T., and Baxter, N.E. (2004) Deposition of carbon and transition metal containing thin films US Patent Application 2004/0208994.
    • (2004)
    • Härkönen, K.1    Doczy, M.2    Lang, T.3    Baxter, N.E.4
  • 115
    • 0004029677 scopus 로고    scopus 로고
    • (ed. W.S. Rees), Wiley-VCH Verlag GmbH, Weinheim
    • Kräuter, G.E. and Rees, W.S. (1996) CVD of Nonmetals (ed. W.S. Rees), Wiley-VCH Verlag GmbH, Weinheim, p. 386.
    • (1996) CVD of Nonmetals , pp. 386
    • Kräuter, G.E.1    Rees, W.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.