Atomic layer deposition of Ir-Pt alloy films

Chemistry of Materials

Volumn 22, Issue 8, 2010, Pages 2517-2525

  Christensen, Steven T ^a   Elam, Jeffrey W ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GROWTH MECHANISMS; GROWTH PER CYCLE; HIGH ASPECT RATIO; IN-SITU; LATTICE PARAMETERS; NEW OPPORTUNITIES; NOBLE METALS; NOBLE-METAL FILMS; NUCLEATION AND GROWTH; OTHER APPLICATIONS; OXYGEN CYCLE; PHASE ALLOYS; PT ALLOY; PT FILMS; QUADRUPOLE MASS SPECTROMETER; TRIMETHYL;

ALLOYS; ASPECT RATIO; CERIUM ALLOYS; GROWTH (MATERIALS); IRIDIUM; IRIDIUM ALLOYS; IRIDIUM COMPOUNDS; MASS SPECTROMETRY; METALLIC FILMS; METALS; MICROELECTRONICS; OXIDE MINERALS; OXYGEN; PLATINUM; PRECIOUS METALS; QUARTZ; X RAY DIFFRACTION;

PLATINUM ALLOYS;

EID: 77951250075     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm9031978     Document Type: Article

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