Atomic layer deposition of transition metals

Nature Materials

Volumn 2, Issue 11, 2003, Pages 749-754

  Lim, Booyong S ^a   Rahtu, Antti ^a   Gordon, Roy G ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; COMPOSITION EFFECTS; DEPOSITION; HYDROGEN; ORGANOMETALLICS; SURFACE REACTIONS; THICKNESS CONTROL; THIN FILMS; WATER;

ATOMIC LAYER DEPOSITION; CHEMICAL REACTANTS; CONFORMAL COATING; DIALKYLACETAMIDINATO METAL COMPOUNDS;

TRANSITION METALS;

EID: 0242583886     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat1000     Document Type: Article

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