Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films

Thin Solid Films

Volumn 517, Issue 20, 2009, Pages 5819-5824

  Putkonen, Matti ^a   Sajavaara, Timo ^b   Rahkila, Paavo ^b   Xu, Leiting ^b   Cheng, Sulin ^b   Niinistö, Lauri ^c   Whitlow, Harry J ^b  

^a Beneq Oy   (Finland)

^b UNIVERSITY OF JYVÄSKYLÄ   (Finland)

^c AALTO UNIVERSITY   (Finland)

Author keywords

Atomic layer deposition; Biocompatibility; Cell culture; Hydroxyapatite

Indexed keywords

AS-DEPOSITED FILMS; CARBONATE CONTENT; CARBONATE IMPURITIES; FILM CRYSTALLINITY; HYDROXYAPATITE THIN FILMS; SI(1 0 0); TETRAMETHYL;

AMORPHOUS FILMS; APATITE; ATOMIC LAYER DEPOSITION; ATOMS; BIOCOMPATIBILITY; BOROSILICATE GLASS; CALCIUM; CELL PROLIFERATION; HYDROXYAPATITE; METALLIC FILMS; POLYMER BLENDS; POLYSTYRENES; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; STOICHIOMETRY;

CELL CULTURE;

EID: 67149107336     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.013     Document Type: Article

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