Atomic layer deposition of platinum thin films

Chemistry of Materials

Volumn 15, Issue 9, 2003, Pages 1924-1928

  Aaltonen, Titta ^a   Ritala, Mikko ^a   Sajavaara, Timo ^a   Keinonen, Juhani ^a   Leskelä, Markku ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL IMPURITIES; DEPOSITION; OXYGEN; PLATINUM; X RAY DIFFRACTION ANALYSIS;

ATOMIC LAYER DEPOSITION;

THIN FILMS;

(METHYLCYCLOPENTADIENYL)TRIMETHYLPLATINUM; OXYGEN; PLATINUM DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL REACTION; FILM; GROWTH RATE; MATERIAL COATING; SYNTHESIS; THICKNESS; X RAY DIFFRACTION;

EID: 0038708429     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm021333t     Document Type: Article

References (26)

1. Nayak, M.; Ezhilvalavan, S.; Tseng, T. Y. In Handbook of Thin Film Materials; Nalwa, H. S., Ed.; Academic Press: San Diego, 2001; Vol. 3, pp 121-123.
2. Hiratani, M.; Nabatame, T.; Matsui, Y.; Imagawa, K.; Kimura, S. J. Electrochem. Soc. 2001, 148, C524.
3. Wilk, G. D.; Wallace, R. M.; Anthony, J. M. J. Appl. Phys. 2001, 89, 5243.
4. Chen, Y.-J.; Kaesz, H. D.; Thridandam, H.; Hicks, R. F. Appl. Phys. Lett. 1988, 53, 1591.
5. Xue, Z.; Thridandam, H.; Kaesz, H. D.; Hicks, R. F. Chem. Mater. 1992, 4, 162.
6. Xue, Z.; Strouse, M. J.; Shuh, D. K.; Knobler, C. B.; Kaesz, H. D.; Hicks, R. F.; Williams, R. S. J. Am. Chem. Soc. 1989, 111, 8779.
7. Kwon, J.-H.; Yoon, S.-G. J. Electrochem. Soc. 1997, 144, 2848.
8. Goswami, J.; Majhi, P.; Wang, C. G.; Dey, S. K. Integr. Ferroelectr. 2002, 42, 13.
9. Rand, M. J. J. Electrochem. Soc. 1973, 120, 686.
10. Kwak, B. S.; First, P. N.; Erbil, A.; Wilkens, B. J.; Budai, J. D.; Chisholm, M. F.; Boatner, L. A. J. Appl. Phys. 1992, 72, 3735.
11. Lecohier, B.; Philippoz, J.-M.; van den Bergh, H. J. Vac. Sci. Technol. B 1992, 10, 262.
12. Lee, J. M.; Hwang, C. S.; Cho, H.-J.; Suk, C.-G.; Kim, H. J. J. Electrochem. Soc. 1998, 145, 1066.
13. Suntola, T. Thin Solid Films 1992, 216, 84.
14. Ritala, M. Appl. Surf. Sci. 1997, 112, 223.
15. Ritala, M.; Leskelä, M. In Handbook of Thin Film Materials; Nalwa, H. S., Ed.; Academic Press: San Diego, 2001; Vol. 1, pp 103-159.
16. Ritala, M.; Leskelä, M.; Dekker, J.-P.; Mutsaers, C.; Soininen P. J.; Skarp, J. Chem. Vap. Deposition 1999, 5, 7.
17. Utriainen, M.; Kröger-Laukkanen, M.; Johansson, L.-S.; Niinistö, L. Appl. Surf. Sci. 2000, 157, 151.
18. Aaltonen, T.; Alén, P.; Ritala, M.; Leskelä, M. Chem. Vap. Deposition 2003, 9, 45.
19. Waldo, R. A. Microbeam Anal. 1988, 23, 310.
20. Jokinen, J.; Haussalo, P.; Keinonen, J.; Ritala, M.; Riihelä, D.; Leskelä, M. Thin Solid Films 1996, 289, 159.
21. Jokinen, J.; Keinonen, J.; Tikkanen, P.; Kuronen, A.; Ahlgren, T.; Nordlund, K. Nucl. Instrum. Methods Phys. Res., Sect. B 1996, 119, 533.
22. Matsushima, T.; Almy, D. B.; White, J. M. Surf. Sci. 1977, 67, 89.
23. Gland, J. L.; Sexton, B. A.; Fisher, G. B. Surf. Sci. 1980, 95, 587.
24. Campbell, C. T.; Ertl, G.; Kuipers, H.; Segner, J. Surf. Sci. 1981, 107, 220.
25. Niehus, H.; Comsa, G. Surf. Sci. 1980, 93, L147.
26. Ohno, Y.; Matsushima, T. Surf. Sci. 1991, 241, 47.