Plasma diagnostics for unraveling process chemistry

Annual Review of Analytical Chemistry

Volumn 1, Issue 1, 2008, Pages 261-291

  Stillahn, Joshua M ^a   Trevino, Kristina J ^a   Fisher, Ellen R ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

Deposition; Etching; Gas surface interactions; Surface modification

Indexed keywords

DIAGNOSTIC TOOLS; ELECTRONIC CONFIGURATION; ETCHING GAS; GAS-SURFACE INTERACTIONS; MOLECULE SURFACE; OPTICAL DIAGNOSTIC TOOLS; PLASMA PROCESSING; PLASMA SPECIES; PROCESS CHEMISTRY; SPECIES DENSITY; SURFACE MODIFICATION;

DIAGNOSTIC PRODUCTS; ETCHING; MASS SPECTROMETRY; MOLECULES; PLASMA DIAGNOSTICS; PLASMAS;

SURFACE REACTIONS;

EID: 74949141124     PISSN: 19361327     EISSN: 19361335     Source Type: Book Series    
DOI: 10.1146/annurev.anchem.1.031207.112953     Document Type: Review

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