Surface loss coefficients of CFx and F radicals on stainless steel

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 6, 2000, Pages 2680-2684

  Singh, Harmeet ^a   Coburn, J W ^a   Graves, David B ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISSIPATION; ETCHING; FLUOROCARBONS; MASS SPECTROMETRY; OPTICAL PUMPING; PLASMA DEVICES; SUBSTRATES; SURFACE PHENOMENA;

APPEARANCE POTENTIAL MASS SPECTROMETRY; INDUCTIVELY COUPLED PLASMAS; LOSS COEFFICIENTS;

STAINLESS STEEL;

EID: 0034317202     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1308585     Document Type: Article

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