Ultraviolet cavity ring-down spectroscopy of free radicals in etching plasmas

Chemical Physics Letters

Volumn 317, Issue 6, 2000, Pages 631-636

  Booth, J P ^a   Cunge, G ^a   Biennier, L ^a   Romanini, D ^a   Kachanov, A ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001666727     PISSN: 00092614     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2614(99)01424-4     Document Type: Article

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