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Volumn 78, Issue 6, 2006, Pages 1187-1202

Radical-surface interactions during film deposition: A sticky situation?

Author keywords

LIF; PECVD; Radicals; Surface reactivity

Indexed keywords


EID: 33745713620     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200678061187     Document Type: Conference Paper
Times cited : (28)

References (62)
  • 42
    • 33745691568 scopus 로고    scopus 로고
    • Ph.D. thesis. Colorado State University
    • J. Zhou. Ph.D. thesis. Colorado State University (2006).
    • (2006)
    • Zhou, J.1
  • 49
    • 33745705805 scopus 로고    scopus 로고
    • Ph.D. thesis, Colorado State University
    • I. T. Martin. Ph.D. thesis, Colorado State University (2005).
    • (2005)
    • Martin, I.T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.