|
|
Volumn 192, Issue 1-4, 2002, Pages 161-175
|
|
Spatially resolved CF, CF 2 , SiF and SiF 2 densities in fluorocarbon containing inductively driven discharges
|
|
Author keywords
Discharge; Fluorescence; Inductive; Laser; Optical; Plasama
|
|
Indexed keywords
ETCHING;
FLUORESCENCE;
FLUOROCARBONS;
GAS HEATING;
LASER APPLICATIONS;
SILICON;
LASER-INDUCED FLUORESCENCE;
SURFACE DISCHARGES;
|
|
EID: 0037198327
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(02)00025-9 Document Type: Conference Paper |
|
Times cited : (16)
|
|
References (39)
|
