Comparison of surface interactions for NH and NH 2 on polymer and metal substrates during NH 3 plasma processing

Journal of Applied Physics

Volumn 92, Issue 1, 2002, Pages 55-63

  Steen, Michelle L ^a   Kull, Kristen R ^a   Fisher, Ellen R ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED SPECIES; DIFFERENT SUBSTRATES; GASPHASE; METAL SUBSTRATE; PLASMA SPECIES; PLATINUM SUBSTRATES; RF-POWER; SCATTER COEFFICIENT; SURFACE GENERATIONS; SURFACE INTERACTIONS; SURFACE REACTIVITY;

IONS; PLASMA DEVICES; PLASMAS; PLATINUM; POLYIMIDES; SUBSTRATES;

SURFACES;

EID: 0036640419     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1486038     Document Type: Article

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