Spatial rotational temperature and emission intensity profiles in silane plasmas

Journal of Physics D: Applied Physics

Volumn 31, Issue 19, 1998, Pages 2513-2520

  Stamou, Spyros ^a   Mataras, Dimitris ^a   Rapakoulias, Dimitris ^a  

^a UNIVERSITY OF PATRAS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; ROTATION; THIN FILMS;

SPATIAL ROTATIONAL TEMPERATURE;

SILANES;

EID: 0032494322     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/19/024     Document Type: Article

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