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Volumn 95, Issue 4, 2004, Pages 1792-1805

Growth and characterization of hydrogenated amorphous silicon thin films from SiH2 radical precursor: Atomic-scale analysis

(3) Sriraman, Saravanapriyan a Aydil, Eray S a Maroudas, Dimitrios b

a University of California (United States)

b University of Massachusetts (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; BOND STRENGTH (CHEMICAL); COMPUTER SIMULATION; DIMERIZATION; FILM GROWTH; HYDROGENATION; MOLECULAR DYNAMICS; MORPHOLOGY; POLYSILANES; PROBABILITY; SUBSTRATES; THIN FILMS;

HYDROGENATED AMORPHOUS SILICON; STRUCTURAL QUALITY;

AMORPHOUS SILICON;

EID: 1542349055 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1636512 Document Type: Article

Times cited : (22)

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