CF2 surface reactivity during hot filament and plasma-enhanced chemical vapor deposition of fluorocarbon films

Chemical Physics Letters

Volumn 430, Issue 1-3, 2006, Pages 113-116

  Liu, Dongping ^a   Martin, Ina T ^a   Fisher, Ellen R ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILAMENTS (LAMP); FLUORINE COMPOUNDS; IMAGING TECHNIQUES; IONS; MASS SPECTROMETERS; NEUTRON SCATTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTION KINETICS;

FILAMENT TEMPERATURE; FLUOROCARBON FILMS; HEXAFLUOROPROPYLENE OXIDE (HFPO);

THIN FILMS;

EID: 33749043458     PISSN: 00092614     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cplett.2006.08.123     Document Type: Article

References (21)

1. Takahashi K., Mitamura T., Ono K., and Setsuhara Y. Appl. Phys. Lett. 82 (2003)
2. Lau K.K.S., Murthy S.K., Lewis H.G.P., Caulfield J.A., and Gleason K.K. J. Fluorine Chem. 122 (2003) 93
3. Schue F., Clarotti G., Aoumar A.A.B., Sledz J., Mas A., Geckeler K.E., Gopel W., and Orsetti A. Macromolecular Reports A 31 (1994) 1161
4. Martin I.T., Malkov G.S., Butoi C.I., and Fisher E.R. J. Vac. Sci. Technol. A22 (2004) 227
5. Lau K.K.S., et al. Nano Lett. 12 (2003) 1701
6. Tanilella R.V., Agraharam S., Allen S.B., Hess D.W., and Kohl P.A. J. Electronic Mater. 31 (2002) 1096
7. d'Agostino R., Cramarossa F., and Fracassi F. In: d'Agostino R. (Ed). Plasma Deposition. Treatment, and Etching of Fluorocarbons (1990), Academic Press, Inc., San Diego 95
8. Limb S.J., Labelle C.B., Gleason K.K., Edell D.J., and Gleason E.F. Appl. Phys. Lett. 68 (1996) 2810
9. Rastogi A.C., and Desu S.B. J. Mater. Res. 21 (2006) 242
10. Butoi C.I., Mackie N.M., Gamble L.J., Castner D.G., Barnd J., Miller A.M., and Fisher E.R. Chem. Mater. 12 (2000) 2014
11. Milard M.M., and Kay E. J. Electrochem. Soc. 129 (1982) 160
12. Cruden B.A., and Gleason K.K. J. Appl. Phys. 89 (2001) 915
13. Butoi C.I., Mackie N.M., Williams K.L., Capps N.E., and Fisher E.R. J. Vac. Sci. Technol. A 18 (2000) 2685
14. Capps N.E., Mackie N.M., and Fisher E.R. J. Appl. Phys. 84 (1998) 4736
15. Williams K.L., Martin I.T., and Fisher E.R. J. Am. Soc. Mass. Spectrom. 13 (2002) 518
16. Liu D., Martin I.T., Zhou J., and Fisher E.R. Pure Appl. Chem. 78 (2006) 1187
17. McCurdy P.R., Bogart K.H.A., Dalleska N.F., and Fisher E.R. Rev. Sci. Instrum. 68 (1997) 1684
18. King D.S., Schenck P.K., and Stephenson J.C. J. Mol. Spectrosc. 78 (1979) 1
19. Martin I.T., Zhou J., and Fisher E.R. J. Appl. Phys. 100 (2006) 013301
20. Bogart K.H.A., Cushing J.P., and Fisher E.R. J. Phys. Chem. B 101 (1997) 10016
21. Yasuda H., and Hsu T. J. Polym. Sci. Polym. Chem. Ed. 15 (1977) 81