Optical emission spectroscopy diagnostics of inductively-driven plasmas in argon gas at low pressures

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 62, Issue 4, 2007, Pages 344-356

  Iordanova, S ^a   Koleva, I ^a  

^a UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

Argon plasma; Collisional radiative model; Inductively driven discharge; Optical emission spectroscopy; Spectroscopy diagnostics

Indexed keywords

ARGON; CARRIER CONCENTRATION; MATHEMATICAL MODELS; OPTICAL EMISSION SPECTROSCOPY;

ARGON PLASMA; COLLISIONAL RADIATIVE MODEL; INDUCTIVELY DRIVEN DISCHARGE; SPECTROSCOPY DIAGNOSTICS;

PLASMAS;

EID: 34249012144     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2007.03.026     Document Type: Article

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