Absolute Density and Sticking Probability of the CN(X 2Σ+) Radicals Produced by the Dissociative Excitation Reaction of BrCN with the Microwave Discharge Flow of Ar

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 11, 2003, Pages 7116-7121

  Ito, Haruhiko ^a   Ichimura, Shin Ya ^a   Namiki, Kei Ichi C ^a   Saitoh, Hidetoshi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Amorphous carbon nitride; BrCN; CN; Dissociative excitation; LIF; Microwave plasma; Radical density; Sticking probability

Indexed keywords

AMORPHOUS MATERIALS; ARGON; BROMINE COMPOUNDS; CARBON NITRIDE; DISSOCIATION; ELECTRONS; ENERGY TRANSFER; LITHIUM COMPOUNDS; MICROWAVES; NITROGEN; PROBABILITY; SURFACE PROPERTIES;

DISSOCIATIVE EXCITATION; METASTABLE STATES;

FREE RADICALS;

EID: 1642536383     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.7116     Document Type: Article

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