SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 12, 2004, Pages 7909-7920

Thin-film silicon - Growth process and solar cell application

b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Amorphous silicon; Microcrystalline silicon; Photo induced degradation; Plasma enhanced chemical vapor deposition; Reactive plasma; Solar cells

Indexed keywords

COST EFFECTIVENESS; GLOW DISCHARGES; GROUND STATE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SOLAR CELLS; THIN FILMS; ULTRAVIOLET RADIATION;

LASER-INDUCED FLUORESCENCE (LIF); MICROCRYSTALLINE SILICON; PHOTO-INDUCED DEGRADATION; REACTIVE PLASMA;

AMORPHOUS SILICON;

EID: 13744253789 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.7909 Document Type: Review

Times cited : (181)

References (53)

1
- 0016573648
- W. E. Spear and P. G. LeComber: Solid State Commun. 17 (1975) 1193.
- (1975) Solid State Commun. , vol.17 , pp. 1193
- Spear, W.E.¹ LeComber, P.G.²

2
- 36749120083
- C. R. Wronski, D. E. Carlson and R. E. Daniel: Appl. Phys. Lett. 29 (1976) 602.
- (1976) Appl. Phys. Lett. , vol.29 , pp. 602
- Wronski, C.R.¹ Carlson, D.E.² Daniel, R.E.³

3
- 0021658879
- ed. J. Pancove Academic Press, New York
- T. Moustakas: Semiconductors and Semimetals 21A, ed. J. Pancove (Academic Press, New York, 1984) p. 55.
- (1984) Semiconductors and Semimetals , vol.21 A , pp. 55
- Moustakas, T.¹

4
- 0343881756
- T. Saito, S. Muramatsu, T. Shimada and M. Migitaka: Appl. Phys. Lett. 42 (1983) 678.
- (1983) Appl. Phys. Lett. , vol.42 , pp. 678
- Saito, T.¹ Muramatsu, S.² Shimada, T.³ Migitaka, M.⁴

5
- 2942527902
- T. Fuyuki, K.-Y. Du, S. Okamoto, S. Yasuda, T. Kimoto, M. Yoshimoto and H. Matsunami: J. Appl. Phys. 64 (1988) 2380.
- (1988) J. Appl. Phys. , vol.64 , pp. 2380
- Fuyuki, T.¹ Du, K.-Y.² Okamoto, S.³ Yasuda, S.⁴ Kimoto, T.⁵ Yoshimoto, M.⁶ Matsunami, H.⁷

6
- 0020632467
- Y. Mishima, M. Hirose, Y. Osaka, K. Nagamine, Y. Ashida and K. Isogaya: Jpn. J. Appl. Phys. 22 (1983) L46.
- (1983) Jpn. J. Appl. Phys. , vol.22
- Mishima, Y.¹ Hirose, M.² Osaka, Y.³ Nagamine, K.⁴ Ashida, Y.⁵ Isogaya, K.⁶

7
- 0042565763
- A. H. Mahan, B. P. Nelson, S. Salamon and R. S. Crandall: Mater. Res. Soc. Symp. Proc. 219 (1991) 673.
- (1991) Mater. Res. Soc. Symp. Proc. , vol.219 , pp. 673
- Mahan, A.H.¹ Nelson, B.P.² Salamon, S.³ Crandall, R.S.⁴

8
- 0001309382
- M. Tsuda, S. Oikawa and K. Saito: J. Chem. Phys. 91 (1989) 6822.
- (1989) J. Chem. Phys. , vol.91 , pp. 6822
- Tsuda, M.¹ Oikawa, S.² Saito, K.³

9
- 0001883643
- J. Perrin, O. Leroy and M. C. Bordage: Contrib. Plasma Phys. 36 (1996) 3.
- (1996) Contrib. Plasma Phys. , vol.36 , pp. 3
- Perrin, J.¹ Leroy, O.² Bordage, M.C.³

10
- 0025401433
- N. Itabashi, N. Nishiwaki, M. Magane, T. Goto, A. Matsuda, C. Yamada and E. Hirota: Jpn. J. Appl. Phys. 29 (1990) 585.
- (1990) Jpn. J. Appl. Phys. , vol.29 , pp. 585
- Itabashi, N.¹ Nishiwaki, N.² Magane, M.³ Goto, T.⁴ Matsuda, A.⁵ Yamada, C.⁶ Hirota, E.⁷

11
- 0025402112
- N. Itabashi, N. Nishiwaki, M. Magane, S. Saito, T. Goto, A. Matsuda, C. Yamada and E. Hirota: Jpn. J. Appl. Phys. 29 (1990) L505.
- (1990) Jpn. J. Appl. Phys. , vol.29
- Itabashi, N.¹ Nishiwaki, N.² Magane, M.³ Saito, S.⁴ Goto, T.⁵ Matsuda, A.⁶ Yamada, C.⁷ Hirota, E.⁸

12
- 0026189910
- K. Tachibana, T. Mukai and H. Harima: Jpn. J. Appl. Phys. 30 (1991) L1208.
- (1991) Jpn. J. Appl. Phys. , vol.30
- Tachibana, K.¹ Mukai, T.² Harima, H.³

13
- 0019574216
- A. Matsuda and K. Tanaka: Thin Solid Films 92 (1982) 171.
- (1982) Thin Solid Films , vol.92 , pp. 171
- Matsuda, A.¹ Tanaka, K.²

14
- 0018334397
- A. Matsuda, K. Nakagawa, K. Tanaka, M. Matsumura, S. Yamasaki, H. Okushi and S. Iizima: J. Non-Cryst. Solids 35&36 (1980) 183.
- (1980) J. Non-cryst. Solids , vol.35-36 , pp. 183
- Matsuda, A.¹ Nakagawa, K.² Tanaka, K.³ Matsumura, M.⁴ Yamasaki, S.⁵ Okushi, H.⁶ Iizima, S.⁷

15
- 0001618994
- Y. Matsumi, T. Hayashi, H. Yoshikawa and S. Komiya: J. Vac. Sci. Technol. A 4 (1986) 1786.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 1786
- Matsumi, Y.¹ Hayashi, T.² Yoshikawa, H.³ Komiya, S.⁴

16
- 0029196505
- A. Kono, N. Koike, H. Nomura and T. Goto: Jpn. J. Appl. Phys. 34 (1995) 307.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 307
- Kono, A.¹ Koike, N.² Nomura, H.³ Goto, T.⁴

17
- 0002544863
- A. Matsuda and T. Goto: Mater. Res. Soc. Symp. Proc. 164 (1990) 3.
- (1990) Mater. Res. Soc. Symp. Proc. , vol.164 , pp. 3
- Matsuda, A.¹ Goto, T.²

18
- 0344751778
- A. Matsuda: J. Non-Cryst. Solids 59&60 (1983) 767.
- (1983) J. Non-cryst. Solids , vol.59-60 , pp. 767
- Matsuda, A.¹

19
- 0001841364
- A. Matsuda, K. Nomoto, Y. Takeuchi, A. Suzuki, A. Yuuki and J. Perrin: Surf. Sci. 227 (1990) 50.
- (1990) Surf. Sci. , vol.227 , pp. 50
- Matsuda, A.¹ Nomoto, K.² Takeuchi, Y.³ Suzuki, A.⁴ Yuuki, A.⁵ Perrin, J.⁶

20
- 0001718953
- Y. Toyoshima, K. Arai, A. Matsuda and K. Tanaka: J. Non-Cryst. Solids 137&138 (1991) 765.
- (1991) J. Non-cryst. Solids , vol.137-138 , pp. 765
- Toyoshima, Y.¹ Arai, K.² Matsuda, A.³ Tanaka, K.⁴

21
- 0026120313
- J.-L. Guizot, K. Nomoto and A. Matsuda: Surf. Sci. 244 (1991) 22.
- (1991) Surf. Sci. , vol.244 , pp. 22
- Guizot, J.-L.¹ Nomoto, K.² Matsuda, A.³

22
- 0002252601
- M. Kondo, M. Fukawa, L. Guo and A. Matsuda: J. Non-Cryst. Solids 266-269 (2000) 84.
- (2000) J. Non-cryst. Solids , vol.266-269 , pp. 84
- Kondo, M.¹ Fukawa, M.² Guo, L.³ Matsuda, A.⁴

23
- 0024781441
- C. C. Tsai, G. B. Anderson, R. Thompson and B. Wacker: J. Non-Cryst. Solids 114 (1989) 151.
- (1989) J. Non-cryst. Solids , vol.114 , pp. 151
- Tsai, C.C.¹ Anderson, G.B.² Thompson, R.³ Wacker, B.⁴

24
- 0029254344
- K. Nakamura, K. Yoshida, S. Takeoka and I. Shimizu: Jpn. J. Appl. Phys. 34 (1995) 442.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 442
- Nakamura, K.¹ Yoshida, K.² Takeoka, S.³ Shimizu, I.⁴

25
- 0002139241
- A. Matsuda: Thin Solid Films 337 (1999) 1.
- (1999) Thin Solid Films , vol.337 , pp. 1
- Matsuda, A.¹

26
- 0347276956
- K. Saito, M. Kondo, M. Fukawa, T. Nishimiya, W. Futako, I. Shimizu and A. Matsuda: Mater. Res. Soc. Symp. Proc. 507 (1998) 843.
- (1998) Mater. Res. Soc. Symp. Proc. , vol.507 , pp. 843
- Saito, K.¹ Kondo, M.² Fukawa, M.³ Nishimiya, T.⁴ Futako, W.⁵ Shimizu, I.⁶ Matsuda, A.⁷

27
- 0000363316
- J. Koh, Y. Lee, H. Fujiwara, C. R. Wronski and R. W. Collins: Appl. Phys. Lett. 73 (1998) 1526.
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1526
- Koh, J.¹ Lee, Y.² Fujiwara, H.³ Wronski, C.R.⁴ Collins, R.W.⁵

28
- 0037137889
- H. Fujiwara, M. Kondo and A. Matsuda: Surf. Sci. 497 (2002) 333.
- (2002) Surf. Sci. , vol.497 , pp. 333
- Fujiwara, H.¹ Kondo, M.² Matsuda, A.³

29
- 0002109343
- H. Fujiwara, Y. Toyoshima, M. Kondo and A. Matsuda: J. Non-Cryst. Solids 266-269 (2000) 38.
- (2000) J. Non-cryst. Solids , vol.266-269 , pp. 38
- Fujiwara, H.¹ Toyoshima, Y.² Kondo, M.³ Matsuda, A.⁴

30
- 0036577284
- H. Fujiwara, M. Kondo and A. Matsuda: Jpn. J. Appl. Phys. 41 (2002) 2821.
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 2821
- Fujiwara, H.¹ Kondo, M.² Matsuda, A.³

31
- 0034904138
- H. Fujiwara, M. Kondo and A. Matsuda: Phys. Rev. B 63 (2001) 115306.
- (2001) Phys. Rev. B , vol.63 , pp. 115306
- Fujiwara, H.¹ Kondo, M.² Matsuda, A.³

32
- 0036540513
- S. Suzuki, M. Kondo and A. Matsuda: J. Non-Cryst. Solids 299-302 (2002) 93.
- (2002) J. Non-cryst. Solids , vol.299-302 , pp. 93
- Suzuki, S.¹ Kondo, M.² Matsuda, A.³

33
- 0000769887
- G. Ganguly and A. Matsuda: Phys. Rev. B 47 (1993) 3661.
- (1993) Phys. Rev. B , vol.47 , pp. 3661
- Ganguly, G.¹ Matsuda, A.²

34
- 0027906879
- G. Ganguly and A. Matsuda: J. Non-Cryst. Solids 164-166 (1993) 31.
- (1993) J. Non-cryst. Solids , vol.164-166 , pp. 31
- Ganguly, G.¹ Matsuda, A.²

35
- 0026918559
- G. Ganguly and A. Matsuda: Jpn. J. Appl. Phys. 31 (1992) L1269.
- (1992) Jpn. J. Appl. Phys. , vol.31
- Ganguly, G.¹ Matsuda, A.²

36
- 0012123371
- Jeju, Korea
- Y. Nasuno, M. Kondo and A. Matsuda: Tech. Digest of PVSEC-12. Jeju, Korea (2001) p. 791.
- (2001) Tech. Digest of PVSEC-12 , pp. 791
- Nasuno, Y.¹ Kondo, M.² Matsuda, A.³

37
- 36749105897
- D. L. Staebler and C. R. Wronski: Appl. Phys. Lett. 28 (1977) 671.
- (1977) Appl. Phys. Lett. , vol.28 , pp. 671
- Staebler, D.L.¹ Wronski, C.R.²

38
- 0022198147
- S. Guha: J. Non-Cryst. Solids 77-78 (1985) 1451.
- (1985) J. Non-cryst. Solids , vol.77-78 , pp. 1451
- Guha, S.¹

39
- 0003138614
- Austria
- K. Saito, M. Sano, K. Matsuda, T. Kondo, T. Nishimoto, K. Ogawa and I. Kajita: Proc. WCPEC-2 Vienna, Austria (1998) p. 351.
- (1998) Proc. WCPEC-2 Vienna , pp. 351
- Saito, K.¹ Sano, M.² Matsuda, K.³ Kondo, T.⁴ Nishimoto, T.⁵ Ogawa, K.⁶ Kajita, I.⁷

40
- 84897584719
- S. Guha, X/ Xu and J. Yang: Mater. Res. Soc. Symp. Proc. 336 (1994) 675.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.336 , pp. 675
- Guha, S.¹ Xu, X.² Yang, J.³

41
- 0030396396
- J. Meier, P. Torres, R. Platz, S. Dubail, U. Kroll, J. A. Anna Selvan, N. Pellaton Vaucher, Ch. Hof, D. Fischer, H. Keppner, A. Shah, K.-D. Ufort and P. Giannoules: Mater. Res. Soc. Symp. Proc. 420 (1996) 3.
- (1996) Mater. Res. Soc. Symp. Proc. , vol.420 , pp. 3
- Meier, J.¹ Torres, P.² Platz, R.³ Dubail, S.⁴ Kroll, U.⁵ Selvan, J.A.A.⁶ Vaucher, N.P.⁷ Hof, Ch.⁸ Fischer, D.⁹ Keppner, H.¹⁰ Shah, A.¹¹ Ufort, K.-D.¹² Giannoules, P.¹³

42
- 0032655931
- K. Yamamoto, M. Yoshimi, T. Suzuki, Yu. Tawada, Y. Okamoto and A. Nakajima: Mater. Res. Soc. Symp. Proc. 507 (1998) 131.
- (1998) Mater. Res. Soc. Symp. Proc. , vol.507 , pp. 131
- Yamamoto, K.¹ Yoshimi, M.² Suzuki, T.³ Tawada, Yu.⁴ Okamoto, Y.⁵ Nakajima, A.⁶

43
- 0001159123
- G. Ganguly, T. Ikeda, T. Nishimiya, K. Saito, M. Kondo and A. Matsuda: Appl. Phys. Lett. 69 (1996) 4224.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 4224
- Ganguly, G.¹ Ikeda, T.² Nishimiya, T.³ Saito, K.⁴ Kondo, M.⁵ Matsuda, A.⁶

44
- 0036532144
- T. Nishimoto, M. Takai, H. Miyahara, M. Kondo and A. Matsuda: J. Non-Cryst. Solids 299-302 (2002) 1116.
- (2002) J. Non-cryst. Solids , vol.299-302 , pp. 1116
- Nishimoto, T.¹ Takai, M.² Miyahara, H.³ Kondo, M.⁴ Matsuda, A.⁵

45
- 0002958679
- M. Takai, T. Nishimoto, T. Takagi, M. Kondo and A. Matsuda: J. Non-Cryst. Solids 266-269 (2000) 90.
- (2000) J. Non-cryst. Solids , vol.266-269 , pp. 90
- Takai, M.¹ Nishimoto, T.² Takagi, T.³ Kondo, M.⁴ Matsuda, A.⁵

46
- 0000956897
- M. Takai, T. Nishimoto, M. Kondo and A. Matsuda: Appl. Phys. Lett. 77 (2000) 2828.
- (2000) Appl. Phys. Lett. , vol.77 , pp. 2828
- Takai, M.¹ Nishimoto, T.² Kondo, M.³ Matsuda, A.⁴

47
- 13744255968
- Japan
- S. Shimizu, M. Kondo and A. Matsuda: Proc. WCPEC-3 Osaka, Japan (2003) 5P-A9-03.
- (2003) Proc. WCPEC-3 Osaka
- Shimizu, S.¹ Kondo, M.² Matsuda, A.³

48
- 13744250718
- Thailand
- S. Shimizu, M. Kondo and A. Matsuda: Tech. Digest of PVSEC-14 Bangkok, Thailand (2004) 22-1.
- (2004) Tech. Digest of PVSEC-14 Bangkok , pp. 22-31
- Shimizu, S.¹ Kondo, M.² Matsuda, A.³

49
- 0032179064
- L. Guo, M. Kondo, M. Fukawa, K. Saito and A. Matsuda: Jpn. J. Appl. Phys. 37 (1998) L1116.
- (1998) Jpn. J. Appl. Phys. , vol.37
- Guo, L.¹ Kondo, M.² Fukawa, M.³ Saito, K.⁴ Matsuda, A.⁵

50
- 0012123371
- Korea
- M. Kondo, T. Nishimoto, M. Takai, S. Suzuki, Y. Nasuno and A. Matsuda: Tech. Digest of PVSEC-12 Jeju, Korea (2001) p. 41.
- (2001) Tech. Digest of PVSEC-12 Jeju , pp. 41
- Kondo, M.¹ Nishimoto, T.² Takai, M.³ Suzuki, S.⁴ Nasuno, Y.⁵ Matsuda, A.⁶

51
- 2942615694
- Japan
- T. Matsui, M. Kondo and A. Matsuda: Proc. WCPEC-3 Osaka, Japan (2003) 5O-A3-02.
- (2003) Proc. WCPEC-3 Osaka
- Matsui, T.¹ Kondo, M.² Matsuda, A.³

52
- 13744252746
- Thailand
- T. Matsui, M. Kondo and A. Matsuda: Dech. Digest of PVSEC-14 Bangkok, Thailand (2004) 33-1.
- (2004) Dech. Digest of PVSEC-14 Bangkok , pp. 33-41
- Matsui, T.¹ Kondo, M.² Matsuda, A.³

53
- 13744249534
- Japan
- C. Niikura, M. Kondo and A. Matsuda: Proc. WCPEC-3 Osaka, Japan (2003) 5P-A9-29.
- (2003) Proc. WCPEC-3 Osaka
- Niikura, C.¹ Kondo, M.² Matsuda, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.