Absolute radical densities in etching plasmas determined by broad-band UV absorption spectroscopy

Plasma Sources Science and Technology

Volumn 7, Issue 3, 1998, Pages 423-430

  Booth, Jean Paul ^a   Cunge, Gilles ^a   Neuilly, François ^a,b   Sadeghi, Nader ^a  

^a UNIV GRENOBLE ALPES   (France)

^b ORANGE LABS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ALUMINUM COMPOUNDS; CARBON INORGANIC COMPOUNDS; FLUORINE COMPOUNDS; LIGHT ABSORPTION; SILICON COMPOUNDS; SULFUR; ULTRAVIOLET SPECTROSCOPY;

ALUMINUM FLUORIDE; CARBON DIFLUORIDE; CARBON FLUORIDE; SILICON DIFLUORIDE;

PLASMA ETCHING;

EID: 0032137652     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/3/021     Document Type: Article

References (31)

1. Booth J P, Hancock G, Perry N D and Toogood M J 1989 J. Appl. Phys. 66 5251
2. Cunge G, Chabert P and Booth J P 1997 Plasma Sources Sci. Technol. 6 349
3. Cunge G, Booth J P and Derouard J 1996 Chem. Phys. Lett. 263 645
4. Maruyama K, Sakai A and Goto T 1993 J. Phys. D: Appl. Phys. 26 199
5. Maruyama K, Ohkouchi K, Ohtsu Y and Goto T 1994 Japan. J. Appl. Phys. 33 4298
6. Haverlag M, Stoffels E, Stoffels W W, Kroesen G M W and de Hoog F J 1996 J. Vac. Sci. Technol. A 14 384
7. Romanini D, Kachanov A A, Sadeghi N and Stoeckel F 1997 Chem. Phys. Lett. 264 316
8. Campargue A, Romanini D and Sadeghi N 1997 J. Phys. D: Appl. Phys. 31 1168
9. Childs M A, Menningen K L, Chevako P, Spellmeyer N W, Anderson L W and Lawler J E 1992 Phys. Lett. 171A 87
10. Childs M A, Menningen K L, Toyoda H, Ueda Y, Anderson L W and Lawler JE 1994 Phys. Lett. 194A 119
11. Menningen K L, Childs M A, Toyoda H, Ueda Y, Anderson L W and Lawler J E 1994 Diamond Relat. Mater. 33 422
12. Wamsley R C, Mitsuhashi K and Lawler J 1993 Rev. Sci. Instrum. 64 45
13. Sharpe S, Hartnett B, Sethi H S and Sethi D S 1987 J. Photochem. 38 1
14. Venkateswarlu P 1950 Phys. Rev. 77 676
15. Mathews C W 1967 Can. J. Phys. 45 2355
16. O'Neill J A and Singh J 1994 J. Appl. Phys. 76 5967
17. O'Neill J A and Singh J 1995 J. Appl. Phys. 77 497
18. King D S, Schenk P K and Stephenson J C 1979 J. Mol. Spectrosc. 78 1
19. Booth J P, Hancock G, Toogood M J and McKendrick K G 1996 J. Phys. Chem. 100 47
20. Porter T L, Mann D E and Acquista N 1965 J. Mol. Spectrosc. 16 228 McKendrick K G, private communication
21. Porter T L, Mann D E and Acquista N 1965 J. Mol. Spectrosc. 16 228 McKendrick K G, private communication
22. Booth J P and Hancock G 1988 Chem. Phys. Lett. 150 457
23. Langhoff S R, Bauschlicher C W Jr and Taylor P R 1988 J. Chem. Phys. 88 5715
24. Khanna V M, Besenbruch G and Margrave JL 1967 J. Chem. Phys. 46 2310
25. Vanhaelemeersch S, Van Hoeymissen J, Vermeylen D and Peeters J 1991 J. Appl. Phys. 70 3892
26. St-Onge L, Sadeghi N, Booth J P, Margot J and Barbeau C 1995 J. Appl. Phys. 78 6957
27. Quick C R Jr and Weston R E Jr 1981 J. Chem. Phys. 74 4951
28. Anderson W R, Crosley D R and Allen J E Jr 1979 J. Chem. Phys. 71 821
29. Larrieu C, Chaillet M and Dargelos A 1992 J. Chem. Phys. 96 3732
30. Holland R and Lyman J L 1987 J. Quant. Spectrosc. Radiat. Transfer 38 79
31. Lee L C, Phillips E and Judge D L 1977 J. Chem. Phys. 67 1237