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Journal of Chemical Physics

Volumn 126, Issue 11, 2007, Pages

Interactions between radical growth precursors on plasma-deposited silicon thin-film surfaces

(3) Bakos, Tamas a Valipa, Mayur S a Maroudas, Dimitrios a

a University of Massachusetts (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISPROPORTIONATION REACTIONS; GROWTH PRECURSORS; PLASMA PROCESS SIMULATORS; REACTION BARRIERS;

ACTIVATION ENERGY; DENSITY FUNCTIONAL THEORY; MOLECULAR DYNAMICS; PLASMA DEPOSITION; SILICON; THIN FILMS;

FREE RADICALS;

EID: 34047114928 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.2672799 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.