A modified molecular beam instrument for the imaging of radicals interacting with surfaces during plasma processing

Review of Scientific Instruments

Volumn 68, Issue 4, 1997, Pages 1684-1693

  McCurdy, Patrick R ^a   Bogart, K H A ^a   Dalleska, N F ^a,b   Fisher, Ellen R ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000494853     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147976     Document Type: Article

References (45)

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