Modulated rf discharges as an effective tool for selecting excited species

Applied Physics Letters

Volumn 75, Issue 1, 1999, Pages 37-39

  Cicala, Grazia ^a   Creatore, Mariadriana ^a   Favia, Pietro ^a   Lamendola, Ritalba ^a   D'Agostino, Riccardo ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001832188     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124269     Document Type: Article

References (14)

1. S. Samukawa and K. Terada, J. Vac. Sci. Technol. B 12, 3300 (1994).
2. S. Samukawa and T. Mieno, Plasma Sources Sci. Technol. 5, 132 (1996).
3. M. E. Ryan, A. M. Hynes, and J. P. S. Badyal, Chem. Mater. 8, 37 (1996).
4. V. Panchalingam, X. Chen, C. R. Savage, R. B. Timmons, and R. C. Eberhart, J. Appl. Polym. Sci. 54, 123 (1994).
5. X. Chen, K. Rajeshwar, and R. B. Timmons, Chem. Mater. 8, 1067 (1996).
6. G. Bruno, P. Capezzuto, M. Losurdo, and G. Cicala, J. Non-Cryst. Solids 137&138, 753 (1991).
7. G. Cicala, M. Losurdo, P. Capezzuto, and G. Bruno, Plasma Sources Sci. Technol. 1, 156 (1992).
8. S. Ashida, C. Lee, and M. A. Liebermann, J. Vac. Sci. Technol. A 13, 2498 (1995).
9. P. Favia, M. V. Stendardo, and R. d'Agostino, Plasma Polymers 1, 91 (1996).
10. R. d'Agostino, F. Cramarossa, S. De Benedictis, and G. Ferraro, Plasma Chem. Plasma Process. 1, 19 (1981).
11. M. H. Hanes and E. J. Bair, J. Chem. Phys. 38, 672 (1963).
12. R. W. B. Pearse and A. G. Gaydon, in The Identification of Molecular Spectra (Wiley, New York, 1976).
13. A. R. Striganov and N. S. Sventitskii, in Tables of Spectral Lines of Neutral and Ionized Atoms (IFI/Plenum New York, Washington, 1968).
14. M. Creatore, P. Favia, G. Cicala, R. Lamendola, and R. d'Agostino, in Plasma Deposition and Treatment of Polymers, MRS Proceedings, edited by W. W. Lee, R. d'Agostino, and M. R. Wertheimer (Material Research Society, Pittsburg, 1999), Vol. 544.