Effects of argon dilution on the translational and rotational temperatures of SiH in silane and disilane plasmas

Journal of Physical Chemistry A

Volumn 109, Issue 46, 2005, Pages 10521-10526

  Zhou, Jie ^a   Zhang, Jianming ^a   Fisher, Ellen R ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON DILUTION; CHEMICAL RADICALS; DISILANE PLASMAS; KINETIC DATA;

COMPUTER SIMULATION; IMAGING TECHNIQUES; PLASMAS; REACTION KINETICS; SILANES; TEMPERATURE DISTRIBUTION;

ARGON;

EID: 28944453999     PISSN: 10895639     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp0541213     Document Type: Article

References (35)

1. Kessels, W. M. M.; McCurdy, P. R.; Williams, K. L.; Barker, G. R.; Venturo, V. A.; Fisher, E. R. J. Phys. Chem. B 2002, 106, 2680.
2. Ho, P.; Breiland, W. G.; Buss, R. J. J. Chem. Phys. 1989, 91, 2627.
3. Longeway, P. A.; Weakliem, H. A.; Estes, R. D. J. Phys. Chem. 1984, 88, 3282.
4. Hertl, M.; Jolly, J. J. Phys. D: Appl. Phys. 2000, 33, 381.
5. Shirai, H.; Sakuma, Y.; Moriya, Y.; Fukai, C.; Ueyama, H. Jpn. J. Appl. Phys., Part 1 1999, 38, 6629.
6. McCurdy, P. R.; Truitt, J. M.; Fisher, E. R. J. Vac. Sci. Technol., A 1999, 17, 2475.
7. Kono, A.; Hirose, S.; Kinoshita, K.; Goto, T. Jpn. J. Appl. Phys., Part 1 1998, 37, 4588.
8. Kono, A.; Koike, N.; Nomura, H.; Goto, T. Jpn. J. Appl. Phys., Part 1 1995, 34, 307.
9. Kessels, W. M. M.; Hoefnagels, J. P. M.; Boogaarts, M. G. H.; Schram, D. C.; van de Sanden, M. C. M. J. Appl. Phys. 2001, 89, 2065.
10. Shirafuji, T.; Tachibana, K.; Matsui, Y. Jpn. J. Appl. Phys., Part 1 1995, 34, 4239.
11. Amorim, J.; Baravian, G.; Jolly, J. J. Phys. D: Appl. Phys. 2000, 33, R51.
12. Kono, A.; Hirose, S.; Goto, T. Jpn. J. Appl. Phys., Part 1 1999, 38, 4389.
13. Yamamoto, Y.; Suganuma, S.; Ito, M.; Hori, M.; Goto, T. Jpn. J. Appl. Phys., Part 1 1997, 36, 4664.
14. Matsumi, Y.; Hayashi, T.; Yoshikawa, H.; Komiya, S. J. Vac. Sci. Technol., A 1986, 4, 1786.
15. Stamou, S.; Mataras, D.; Rapakoulias, D. J. Phys. D: Appl. Phys. 1998, 31, 2513.
16. Zhang, J.; Williams, K. L.; Fisher, E. R. J. Phys. Chem. A 2003, 107, 593597.
17. McCurdy, P. R.; Butoi, C. I.; Williams, K. L.; Fisher, E. R. J. Phys. Chem. B 1999, 103, 6919,
18. McCurdy, P. R.; Venturo, V. A.; Fisher, E. R. Chem. Phys. Lett. 1997, 274, 120.
19. McCurdy, P. R.; Bogart, K. H. A.; Dalleska, N. F.; Fisher, E. R. Rev. Sci. Instrum. 1997, 68, 1684.
20. Bogart, K. H. A.; Cushing, J. P.; Fisher, E. R. J. Phys. Chem. B 1997, 101, 10016.
21. Fisher, E. R.; Ho, P.; Breiland, W. G.; Buss, R. J. J. Phys. Chem. 1993, 97, 10287.
22. Zhang, J.; Fisher, E. R. J. Phys. Chem. B 2004, 108, 9821.
23. Buss, R. J.; Ho, P. IEEE Trans. Plasma Sci. 1996, 24, 79.
24. Bogart, K. H. A.; Cushing, J. P.; Fisher, E. R. Chem. Phys. Lett. 1997, 207, 377.
25. Patterson, G. N. Introduction to the Kinetic Theory of Gas Flows; University of Toronto Press: Toronto, 1971.
26. Bauer, W.; Becker, K. H.; Duren, R.; Hubrich, C.; Meuser, R. Chem. Phys. Lett. 1984, 108, 560.
27. Luque, J.; Crosley, D. R. "LIFBASE: Database and spectral simulation (version 1.5)," SRI International, 1999.
28. Nomura, H.; Kono, A.; Goto, T. Jpn. J. Appl. Phys., Part 1 1994, 33, 4165.
29. Gallagher, A.; Howling, A. A.; Hollenstein, C. J. Appl. Phys. 2002, 91, 5571.
30. Doyle, J. R.; Doughty, D. A.; Gallagher, A. J. Appl. Phys. 1992, 71, 4727.
31. Schmitt, J. P. M.; Gressier, P.; Krishnan, M.; de Rosny, G.; Perrin, J. J. Chem. Phys. 1984, 84, 281.
32. Perrin, J.; Delafosse, E. J. Phys. D: Appl. Phys. 1980, 13, 759.
33. Nomura, H.; Akimoto, K.; Kono, A.; Goto, T. J. Phys. D: Appl. Phys. 1995, 28, 1977.
34. Tanaka, T.; Hiramatsu, M.; Nawata, M.; Kono, A.; Goto, T. J. Phys. D: Appl. Phys. 1994, 27, 1660.
35. Zhou, J.; Ayers, R.; Adams, E.; Martin, I. T.; Liu, D.; Fisher, E. R. Plasma Sources Sci. Technol., manuscript in preparation.