Fourier transform infrared phase-modulated ellipsometry for in situ diagnostics of plasma-surface interactions

Journal of Physics D: Applied Physics

Volumn 37, Issue 6, 2004, Pages

  Shirafuji, T ^a   Motomura, H ^a,b   Tachibana, K ^a  

^a KYOTO UNIVERSITY   (Japan)

^b EHIME UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GRID POLARIZERS; PLASMA-SURFACE INTERACTIONS;

ABSORPTION SPECTROSCOPY; ELLIPSOMETRY; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; PHASE MODULATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLARIZATION;

PLASMA THEORY;

EID: 1842477085     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/6/R01     Document Type: Review

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