Kinetics of fluorine atoms in high-density carbon-tetrafluoride plasmas

Journal of Applied Physics

Volumn 82, Issue 12, 1997, Pages 5938-5943

  Sasaki, K ^a   Kawai, Y ^a   Suzuki, C ^a   Kadota, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMS; ELECTRONIC DENSITY OF STATES; FLUORINE; ORGANIC COMPOUNDS; PLASMAS; ULTRAVIOLET SPECTROSCOPY; VACUUM APPLICATIONS;

CARBON TETRAFLUORIDE; LIFETIME MEASUREMENT; SURFACE LOSS PROBABILITY; VACUUM ULTRAVIOLET ABSORPTION SPECTROSCOPY;

REACTION KINETICS;

EID: 0031361691     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366495     Document Type: Article

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