Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: A review

Microelectronics Journal

Volumn 35, Issue 2, 2004, Pages 131-143

  Malek, Chantal Khan ^a   Saile, Volker ^b  

^a CNRS   (France)

^b UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

3D micromachining; High aspect ratio; LIGA; Microfluidics; Micromechanics; Microoptics

Indexed keywords

ASPECT RATIO; COMPOSITE MICROMECHANICS; COST EFFECTIVENESS; LITHOGRAPHY; MICROMACHINING; MICROMETERS; MICROOPTICS; MICROSTRUCTURE; POLYMERS; POLYMETHYL METHACRYLATES; PRECISION ENGINEERING; SILICON; SYNCHROTRON RADIATION;

MICROFABRICATION PROCESS; MICROFLUIDICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0347603968     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2003.10.003     Document Type: Article

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