Refractive microlens arrays made by contactless embossing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3135, Issue , 1997, Pages 96-105

  Picard, Antoni ^a   Ehrfeld, Wolfgang ^a   Löwe, Holger ^a   Müller, Holger ^a   Schulze, Jens ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

Alignment; Compression molding; Embossing; LIGA; Micro optical bench; Micro optics; Microlens arrays; MOEMS; Plastic optics; Refractive microlens

Indexed keywords

ALIGNMENT; COMPRESSION MOLDING; COST EFFECTIVENESS; DIES; HYBRID SYSTEMS; LENSES; MICROFABRICATION; MICROOPTICS; MOLDING; OPTICAL INSTRUMENT LENSES; OPTICAL INSTRUMENTS; THICKNESS MEASUREMENT;

EMBOSSING; LIGA; MICRO-OPTICAL BENCH; MICROLENS ARRAYS; MOEMS; PLASTIC OPTICS; REFRACTIVE MICROLENS;

MICROLENSES;

EID: 0346751871     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284097     Document Type: Conference Paper

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