Progress in magnetic microactuators

Microsystem Technologies

Volumn 5, Issue 2, 1998, Pages 59-61

  Guckel, H ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011137070     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050141     Document Type: Article

References (8)

1. Becker EW; Ehrfeld W; Hagmann P; Maner A; Münchmeyer D (1986) Fabrication of micro structures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA Process). Microelectronic Engineering, vol. 4, 35-56
2. Emmerich H (1995) Design of an alignment procedure for multi-level deep X-ray lithography, Masters Thesis, University of Wisconsin, Madison
3. Fischer K; Guckel H (1997) Long throw linear magnetic actuators stackable to one millimeter of structural height. HARMST '97, Madison, WI, 20-21 June, 1997
4. Guckel H; Skrobis K; Christenson T; Klein J; Han S; Choi B; Lovell E (1991) Fabrication of assembled micromechanical components via deep X-ray lithography. Proceedings of IEEE Micro Electro Mechanical Systems, Nara, Japan, January 1991, 74-79
5. Guckel H; Christensen T; Skrobis K (1995) Formation of microstructures using a preformed photoresist sheet. US Patent #5378583
6. Guckel H: (1995) Deep X-ray lithography efforts and progress in the United States. Proceedings for the 1st International Micromachine Symposium, Tokyo, Japan, November 1-2, 1995
7. Guckel H et al. (1996) Advances in photoresist based processing tools for 3-dimensional precision and micro mechanics. 1996 Solid-State Sensor and Actuator Workshop. Hilton Head Island, NC, 2-6 June 1996
8. Klein J; Guckel H (1997) High winding density micro coils for magnetic actuators. HARMST '97, Madison, WI, 20-21 June, 1997