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Volumn 6, Issue 6, 2000, Pages 235-240

LIGA fabrication and test of a DC type magnetohydrodynamic (MHD) micropump

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0007605489     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420000068     Document Type: Article
Times cited : (46)

References (11)
  • 1
    • 0025846559 scopus 로고
    • The LIGA technique - A novel concept for microstructures and the combination of si-technologies by injection molding
    • Nara, Japan: IEEE Press
    • Menz W; Bacher W; Harmening M; Michael A (1991) The LIGA technique - a novel concept for microstructures and the combination of Si-technologies by injection molding. In: IEEE Workshop on Micro Electro Mechanical Systems, pp. 69-73. Nara, Japan: IEEE Press
    • (1991) IEEE Workshop on Micro Electro Mechanical Systems , pp. 69-73
    • Menz, W.1    Bacher, W.2    Harmening, M.3    Michael, A.4
  • 3
    • 0027695246 scopus 로고
    • A valve-less diffuser/nozzle based fluid pump
    • Stemme E; Stemme G (1993) A valve-less diffuser/nozzle based fluid pump, Sensors and Actuators A 39: 159-167
    • (1993) Sensors and Actuators A , vol.39 , pp. 159-167
    • Stemme, E.1    Stemme, G.2
  • 7
    • 0021796933 scopus 로고
    • Transduction principles of a liquid state electromagnetic transducer
    • Ajisaka H; Hixson EL (1985) Transduction principles of a liquid state electromagnetic transducer, Journal of Acoustic Society of America 77(5): 1933-1938
    • (1985) Journal of Acoustic Society of America , vol.77 , Issue.5 , pp. 1933-1938
    • Ajisaka, H.1    Hixson, E.L.2
  • 8
    • 0006110372 scopus 로고
    • An alternating field induction flow meter of high sensitivity
    • Kolin AQ (1945) An alternating field induction flow meter of high sensitivity, The Review of Scientific Instruments 16(5): 109-116
    • (1945) The Review of Scientific Instruments , vol.16 , Issue.5 , pp. 109-116
    • Kolin, A.Q.1
  • 9
    • 0042086175 scopus 로고
    • An electromagnetic flowmeter for low conductivity fluid
    • Technical Report
    • Balling NR; Connor BV (1969) An electromagnetic flowmeter for low conductivity fluid, Jet Propulsion Laboratory, Technical Report, 320-329
    • (1969) Jet Propulsion Laboratory , pp. 320-329
    • Balling, N.R.1    Connor, B.V.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.