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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2906, Issue , 1996, Pages 202-210

Microactuators as driving units for microbotic systems

(9) Lehr, Heinz a Abel, S a Dopper J a Ehrfeld, Wolfgang a Hagemann, B a Kämper, Klaus P a Michel, Frank a Schulz, Ch a Thurigen C a

a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH (Germany)

Author keywords

LIGA technique; Micro fluidic systems; Microactuators; Micromotors

Indexed keywords

APPLICATIONS; COMMUNICATION SYSTEMS; MICROACTUATORS; MICROFABRICATION; ROBOTICS;

APPROPRIATE MATERIALS; COMPLETE SYSTEMS; ELECTROMAGNETIC MICROMOTORS; FLUIDIC SYSTEMS; FORCES AND TORQUES; GEAR-WHEELS; GOOD HANDLINGS; HIGH PRECISION POSITIONING; HIGH ROTATIONAL SPEEDS; HYBRID CONCEPTS; INERTIAL MASSES; LIGA TECHNIQUE; LOW ENERGY CONSUMPTIONS; MECHANICAL INTERFACES; MICRO FLUIDIC SYSTEMS; MICROFABRICATION METHODS; MICROMOTORS; MILLIMETER RANGES; MONOLITHIC FABRICATIONS; PRE-REQUISITES; ROBOTIC APPLICATIONS; ROBOTIC SYSTEMS; ROTATIONAL FREQUENCIES; ROTATIONAL MOTIONS;

ACTUATORS;

EID: 0347382220 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.260624 Document Type: Conference Paper

Times cited : (19)

References (9)

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5
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6
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8
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9
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