Automated array assembly: A high throughput, low cost assembly process for LIGA-fabricated micro-components

Microsystem Technologies

Volumn 4, Issue 1, 1997, Pages 25-27

  Egert, C M ^a   Hylton, K W ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010952594     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050086     Document Type: Article

References (1)

1. Khan Malek C; et al.: (1996) X-ray microfabrication activities at the center for advanced microstructures and devices, to be published in Rev. Sci. Instr.