Characterization of a micro optical distance sensor

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 29-30

  Wallrabe, U ^a   Hollenbach, U ^a   Krippner, P ^b   Mohr, J ^a   Oka, T ^c  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b ABB AG   (Germany)

^c MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MEASUREMENT RANGE; OPTICAL DISTANCE; PLANAR CHIPS; SPOT SIZES;

MOEMS;

EID: 84963756664     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031428     Document Type: Conference Paper

References (3)

1. T. Oka, H. Nakajima, A. Shiratsuki, M. Tsugai, U. Wallrabe, U.Hollenbach, P. Krippner and J. Mohr; "Development of a Micro-Optical Distance Sensor with Electrical I/O Interface", Proc. of Transducers Conf. 01, Munich, June 2001.
2. J. Mohr, A. Last, U. Hollenbach, T. Oka, U. Wallrabe: "A Modular Fabrication Concept for Micro Optical Systems." IEEE/LEOS International Conference on OPTICAL MEMS 2001, Okinawa, Japan, Sept. 2001, pp. 77-78
3. U.Hollenbach, P. Krippner, J. Mohr, T. Oka, U.Wallrabe; "A Modular Fabrication Concept for EOSS is Demonstrated by a Micro Optical Distance Sensor", Proc. of OPTO Conf., pp 35-40, Erfurt, 14.-16. May 2002.