X-ray lens with kinoform refractive profile created by x-ray lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4783, Issue , 2002, Pages 176-184

  Shabel'nikov, L ^a   Nazmov, V ^b   Pantenburg, F J ^b   Mohr, J ^b   Saile, V ^b   Yunkin, V ^a   Kouznetsov, S ^a   Pindyurin, V ^c   Snigireva, I ^d   Snigirev, A ^d  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^c BUDKER INSTITUTE OF NUCLEAR PHYSICS   (Russian Federation)

^d EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Absorption; Focusing; Lenses; Lithography; Parabolic; Refraction; X rays

Indexed keywords

DIFFRACTION; FOCUSING; LENSES; LIGHT ABSORPTION; OPTICAL DESIGN; REFRACTION;

BEAM FORMATION SCHEMES; KINOFORM REFRACTIVE PROFILE; REFRACTIVE FOCUSING DEVICES; X RAY LENS;

X RAY LITHOGRAPHY;

EID: 0036983483     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.455688     Document Type: Conference Paper

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