Polymers - an excellent and increasingly used material for microsystems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 172-184

  Bley, P ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; INJECTION MOLDING; MICROACTUATORS; MICROOPTICS; MICROSENSORS; MICROSTRUCTURE; THREE DIMENSIONAL; X RAY LITHOGRAPHY;

ELECTROCHEMICAL TRANSDUCERS; MICROFLUIDICS; MICROSYSTEMS;

POLYMERS;

EID: 0033319988     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (45)