Multi-level, LIGA-like process for three dimensional actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 285-289

  Massoud Ansari, S ^a   Mangat, P S ^a   Klein, J ^a   Guckel, H ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BONDING; DESIGN; ELECTROPLATING; ELECTROSTATIC DEVICES; FABRICATION; LAPPING; PHOTORESISTS; POLISHING; THREE DIMENSIONAL;

ELECTROPLATED SURFACES; ELECTROSTATIC ACTUATORS; FORCE OUTPUTS; REPLANARIZATION;

MICROELECTRONIC PROCESSING;

EID: 0029751906     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)