An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives

Microsystem Technologies

Volumn 5, Issue 2, 1998, Pages 69-71

  Nakamura, S ^a   Suzuki, K ^a   Ataka, M ^a   Fujita, H ^a   Basrour, S ^b   Soumann, V ^b   Labachelerie, M ^b   Daniau, W ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b LPMO   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141999914     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050144     Document Type: Article

References (6)

1. Fukuda D; et al. (1997) Micro array type electron multipler as a two dimensional position sensitive detector: Proc. of MEM97, 1997-1, Nagoya, Japan: 295-298
2. Nakamura S; Fujita H (1996) Design consideration of an electrostatic micro actuator for a magnetic head tracking system of hard disk drives.: Proc. of 1st Europe-Asia congress on mechatronics. 2.1996-10 Besancon, France: 778-783
3. Mori K; et al. (1991) A dual-stage magnetic disk drive actuator using a piezoelectric device for high track density.: IEEE Trans. on Magn., 27-6: 5298-5300
4. Imamuram T; Koshikawa T; Katayama M (1996) Transverse mode electrostatic microactuator for MEMS-Based HDD sliders: Proc. of MEMS96, 1996-2, San Diego, U.S.A.: 216-221
5. Ohwe T; et al. (1996) A new integrated suspension for pico-sliders.: IEEE Trans. on Magn. 32-5: 3648-3650
6. Ballandres S; et al. (1995) Deep etch x-ray lithography using silicon-gold masks fabricated by deep etch UV lithography and electroforming. J. Micromech. Microeng. 5: 203-208