LIGA - A technology for fabricating microstructures and microsystems

Sensors and Materials

Volumn 10, Issue 6, 1998, Pages 363-373

  Mohr, Jürgen ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

LIGA process; Microoptical bench; Micropump; Microspectrometer; Microsystem; Waveguide

Indexed keywords

EID: 0040598862     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

1. R. Wechsung: First results of NEXUS Market Study, NEXUS Internal Communication (1997).
2. E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner and D. Münchmeyer: Microelectronic Engineering 4 (1986) 35.
3. J. Mohr, C. Burbaum, P. Bley, W. Menz and U. Wallrabe: Micro System Technologies 90, ed. H. Reichl: (Springer Verlag, Berlin, 1990) p. 529.
4. K. Schubert, W. Bier, G. Linder and D. Seidel: Industrial Diamond Review 50 No. 5 (1990).
5. W. K. Schomburg, W. Bacher, W. Bier, B. Bustgens, J. Fahrenberg, C. Goll: Proc. ASME '95, San Francisco (1995) 951.
6. U. Wallrabe, J. Mohr, I. Tesari and K Wulff: Proc. IEEE MEMS Workshop, San Diego (1996) 462.
7. A. Ruzzu, K. Bade, J. Fahrenberg and D. Maas: accepted for publication in J. Micromech. Microeng.
8. A. Müller, J. Hehmann, A. Rogner, J. Göttert and J. Mohr: Proc. of ECO '95, Brussels (1995).
9. P. Krippner, J. Mohr, C. Müller and C. Van der Sel: SPIE Proc. Series 2783 (1996) 277.