Integration of LIGA Structures with CMOS Circuitry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3046, Issue , 1997, Pages 230-241

  Stadler, S ^a   Ajmera, P K ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

CMOS circuits; Integration; Liga; Mems; Microelectromechanical systems

Indexed keywords

AUTOMOBILE MANUFACTURE; CAPACITIVE SENSORS; ELECTRODES; ELECTROMECHANICAL DEVICES; ETCHING; FABRICATION; INTEGRATION; MEMS; SILICON; SUBSTRATES; TIMING CIRCUITS;

CMOS CIRCUITS; DIRECT INTEGRATION; FABRICATION PROCESS; INTEGRATED CIRCUIT FABRICATION; INTEGRATION PROCESS; LIGA; MECHANICAL STRUCTURES; SACRIFICIAL LAYER ETCHINGS;

CMOS INTEGRATED CIRCUITS;

EID: 0011211061     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276612     Document Type: Conference Paper

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