Developing new markets for high aspect ratio micro-machined devices

Microsystem Technologies

Volumn 5, Issue 2, 1998, Pages 65-68

  Skardon, J ^a   Vandenberg, M ^a  

^a MEMStek Products   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346121266     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050143     Document Type: Article

References (3)

1. Deng K; Dewa AS; Ritter DC; Bonham C; Guckel H (1997) Characterization of gear pumps fabricated by LIGA. Microsystems Tech. Journal. This issue
2. Dewa AS; Deng K; Ritter DC; Bonham C; Guckel H; Massod-Ansari S (1997) Development of LIGA-fabricated, self-priming, in-line gear pumps. Technical Digest, The 9th International Conference on Solid-Status Sensors and Actuators. Transducers '97 (Chicago, IL June 16- 19)
3. Moore Geoffrey A (1991) Crossing the Chasm: marketing and selling technology products to mainstream customers, pp 136-167. New York: Narper Collins