Novel micro electro-discharge machining method using electrodes fabricated by the LIGA process

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 238-243

  Takahata, Ken'ichi ^a   Shibaike, Narito ^a   Guckel, Henry ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COPPER; ELECTRIC DISCHARGES; ELECTROPLATING; MICROELECTRODES; WEAR RESISTANCE;

MICRO ELECTRO-DISCHARGE MACHINING METHOD;

MICROMACHINING;

EID: 0032658389     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)