Closed loop controlled, large throw, magnetic linear microactuator with 1000 μm structural height

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 414-418

  Guckel, H ^a   Fischer, K ^a   Stiers, E ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CLOSED LOOP CONTROL SYSTEMS; CONTROL SYSTEM SYNTHESIS; FEEDBACK; INDUCTANCE MEASUREMENT; LINEAR CONTROL SYSTEMS; MAGNETIC DEVICES; POSITION CONTROL;

MAGNETIC LINEAR MICROACTUATORS;

ACTUATORS;

EID: 0031650483     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)