LIGA-fabricated compact mm-wave linear accelerator cavities

Microsystem Technologies

Volumn 4, Issue 4, 1998, Pages 193-196

  Song, J J ^a   Bajikar, S ^a   Decarlo, F ^a   Kang, Y W ^a   Kustom, R L ^a   Mancini, D C ^a   Nassiri, A ^a   Lai, B ^a   Feinerman, A D ^b   White, V ^c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

^c UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010941080     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050129     Document Type: Article

References (12)

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4. Song JJ; et al.: SPIE-Micromachining and Microfabrication'96, Austin Texas, V2888 (1996)
5. Nassiri A; et al.: IEEE, International Electron Device Conference, Washington DC, 169 (1993)
6. Kang YW; et al.: Proc. of the 1995 Particle Accelerator Conference, p 640 (1995)
7. Matthews P; Khounsary A: private communication
8. Pantenburg FJ; et al.: "Adhesion problems in deep-etch X-ray lithography caused by fluorescence radiation from the plating base." Microelectronics Eng., V23, p 223 (1994)
9. Guckel H; et al.: MEMS 1991, Nara, Japan, January, 1991
10. Lai B; et al.: SPIE-Micromachining and Microfabrication'96, Austin Texas, V2888 (1996)
11. Ehrfeld EW; et al.: J Vac Sci Technol B6 (1), 178 (1988)
12. DeCarlo F; et al.: in these proceedings