Fabrication of high-aspect-ratio precision MEMS with LIGA using synchrotron radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 119-130

  Khan Malek, Chantal ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROMACHINING; MICROSTRUCTURE; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

MICROFABRICATION TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0035772906     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448957     Document Type: Conference Paper

References (91)

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